发明申请
- 专利标题: High-purity large-volume monocrystals that are especially radiation-resistant and method of making them from crystal
- 专利标题(中): 特别是耐辐射的高纯度大容量单晶及其制造方法
-
申请号: US12539795申请日: 2009-08-12
-
公开(公告)号: US20090297430A1公开(公告)日: 2009-12-03
- 发明人: Andreas Weisleder , Matthias Mueller , Joerg Kandler , Andreas Menzel , Rainer Guett
- 申请人: Andreas Weisleder , Matthias Mueller , Joerg Kandler , Andreas Menzel , Rainer Guett
- 优先权: DE102005059531.6 20051213
- 主分类号: C01F11/22
- IPC分类号: C01F11/22 ; C01F5/28
摘要:
The high-purity alkaline earth halide crystals, especially CaF2, BaF2 or MgF2 crystals, have a diffuse scatter distribution function value of less than 7×10−7, an RMS uniformity of refractive index of less than 15×10−8 after subtraction of Zernike coefficients and an RMS value of birefringence in the (111) direction of less than 0.2 nm/cm. Preferably the crystals exhibit a loss coefficient of less than 5×10−4 cm−1 after irradiation with 10×109 laser pulses with an energy density of 10 mJ/cm2 at a wavelength of 193 nm. Also they have RMS birefringence in the (100) direction or the (111) direction that is less than 0.35 nm/cm.