发明申请
- 专利标题: MODEL-BASED PROCESS SIMULATION SYSTEMS AND METHODS
- 专利标题(中): 基于模型的过程模拟系统和方法
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申请号: US12475095申请日: 2009-05-29
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公开(公告)号: US20090300573A1公开(公告)日: 2009-12-03
- 发明人: Yu Cao , Wenjin Shao , Ronaldus Johannes Gijsbertus Goossens , Jun Ye , James Patrick Koonmen
- 申请人: Yu Cao , Wenjin Shao , Ronaldus Johannes Gijsbertus Goossens , Jun Ye , James Patrick Koonmen
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Systems and methods for process simulation are described. The methods may use a reference model identifying sensitivity of a reference scanner to a set of tunable parameters. Chip fabrication from a chip design may be simulated using the reference model, wherein the chip design is expressed as one or more masks. An iterative retuning and simulation process may be used to optimize critical dimension in the simulated chip and to obtain convergence of the simulated chip with an expected chip. Additionally, a designer may be provided with a set of results from which an updated chip design is created.
公开/授权文献
- US08806387B2 Model-based process simulation systems and methods 公开/授权日:2014-08-12