发明申请
US20090301998A1 METHOD OF FORMING NOZZLE HOLE AND METHOD OF MANUFACTURING INKJET RECORDING HEAD
审中-公开
形成喷嘴孔的方法和制造喷墨记录头的方法
- 专利标题： METHOD OF FORMING NOZZLE HOLE AND METHOD OF MANUFACTURING INKJET RECORDING HEAD
- 专利标题（中）： 形成喷嘴孔的方法和制造喷墨记录头的方法
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申请号： US12478134申请日： 2009-06-04
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公开(公告)号： US20090301998A1公开(公告)日： 2009-12-10
- 发明人: Hiroki UCHIYAMA , Shuji TAKAHASHI , Shinya SUGIMOTO
- 申请人： Hiroki UCHIYAMA , Shuji TAKAHASHI , Shinya SUGIMOTO
- 申请人地址： JP Tokyo
- 专利权人： FUJIFILM CORPORATION
- 当前专利权人： FUJIFILM CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2008-151002 20080609
- 主分类号： B44C1/22
- IPC分类号： B44C1/22
摘要：
A first substrate 10 having a channel 12 which passes through the inside thereof and an opening 14a or 14b of the channel which is formed on at least one side thereof, and a second substrate 20 for forming a nozzle hole communicating with the channel are prepared. The second substrate is bonded to the one side of the first substrate where the channel opening 14b is formed so that the opening is blocked by the second substrate. The second substrate is etched with a mixed etching fluid, which contains a high-pressure fluid and an etching solution, fed thereto via the channel of the first substrate, thereby forming the nozzle hole 22 communicating with the channel.
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