发明申请
US20090302439A1 Semiconductor Device Having Electrical Devices Mounted to IPD Structure and Method of Shielding Electromagnetic Interference
有权
具有安装到IPD结构的电气设备的半导体器件和屏蔽电磁干扰的方法
- 专利标题: Semiconductor Device Having Electrical Devices Mounted to IPD Structure and Method of Shielding Electromagnetic Interference
- 专利标题(中): 具有安装到IPD结构的电气设备的半导体器件和屏蔽电磁干扰的方法
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申请号: US12133133申请日: 2008-06-04
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公开(公告)号: US20090302439A1公开(公告)日: 2009-12-10
- 发明人: Reza A. Pagaila , Byung Tai Do , Yaojian Lin , Rui Huang
- 申请人: Reza A. Pagaila , Byung Tai Do , Yaojian Lin , Rui Huang
- 申请人地址: SG Singapore
- 专利权人: STATS CHIPPAC, LTD.
- 当前专利权人: STATS CHIPPAC, LTD.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L23/02
摘要:
A semiconductor device is made by forming an integrated passive device (IPD) structure on a substrate, mounting first and second electrical devices to a first surface of the IPD structure, depositing encapsulant over the first and second electrical devices and IPD structure, forming a shielding layer over the encapsulant, and electrically connecting the shielding layer to a conductive channel in the IPD structure. The conductive channel is connected to ground potential to isolate the first and second electrical devices from external interference. A recess can be formed in the encapsulant material between the first and second electrical devices. The shielding layer extends into the recess. An interconnect structure is formed on a second surface of the IPD structure. The interconnect structure is electrically connected to the first and second electrical devices and IPD structure. A shielding cage can be formed over the first electrical device prior to depositing encapsulant.
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