发明申请
US20090303482A1 Enhanced Ovl dummy field enabling "on-the-fly" ovl measurement methods
有权
增强的Ovl虚拟场可实现“即时”ovl测量方法
- 专利标题： Enhanced Ovl dummy field enabling "on-the-fly" ovl measurement methods
- 专利标题（中）： 增强的Ovl虚拟场可实现“即时”ovl测量方法
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申请号： US12455640申请日： 2009-06-04
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公开(公告)号： US20090303482A1公开(公告)日： 2009-12-10
- 发明人: Vladimir Levinski , Michael E. Adel , Mark Ghinovker , Alexander Svizher
- 申请人： Vladimir Levinski , Michael E. Adel , Mark Ghinovker , Alexander Svizher
- 主分类号： G01B11/00
- IPC分类号： G01B11/00
摘要：
A semiconductor wafer may include a dummy field configured to enable overlay measurements. The enhanced dummy field may include a plurality of encoding blocs that enable OVL measurements to be made throughout the enhanced dummy field.
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