发明申请
- 专利标题: Semiconductor memory device and method of fabricating the same
- 专利标题(中): 半导体存储器件及其制造方法
-
申请号: US12457500申请日: 2009-06-12
-
公开(公告)号: US20090309147A1公开(公告)日: 2009-12-17
- 发明人: Hong-soo Kim , Su-in Baek , Seung-wook Choi
- 申请人: Hong-soo Kim , Su-in Baek , Seung-wook Choi
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2008-0055432 20080612
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/10 ; H01L21/762
摘要:
Provided are a semiconductor memory device whereby generation of dishing during planarization of a peripheral circuit region is suppressed, and a method of fabricating the semiconductor memory device. The semiconductor memory device includes a semiconductor substrate comprising a first active area in a memory cell region and a second active area in a peripheral circuit region; a plurality of first isolation films and a plurality of second isolation films protruding from a surface of the semiconductor substrate and defining the first active area and the second active area, respectively; and at least one polish stopper film formed within the second active area and protruding from the surface of the semiconductor substrate.
公开/授权文献
信息查询
IPC分类: