发明申请
- 专利标题: Vacuum Chamber
- 专利标题(中): 真空室
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申请号: US12065263申请日: 2006-07-21
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公开(公告)号: US20090314199A1公开(公告)日: 2009-12-24
- 发明人: Yasukuni Iwasaki , Yoshimitsu Fukuda , Osamu Miyazaki
- 申请人: Yasukuni Iwasaki , Yoshimitsu Fukuda , Osamu Miyazaki
- 申请人地址: JP Hyogo
- 专利权人: SHINMAYWA INDUSTRIES, LTD.
- 当前专利权人: SHINMAYWA INDUSTRIES, LTD.
- 当前专利权人地址: JP Hyogo
- 优先权: JP2005-249284 20050830
- 国际申请: PCT/JP2006/314499 WO 20060721
- 主分类号: C23C16/455
- IPC分类号: C23C16/455
摘要:
The present invention provides a vacuum chamber capable of simplifying the structure of the arrangement of a cooling passage. The vacuum chamber of the present invention includes a plurality of wall members, the plurality of the wall members are connected to each other to construct a chamber main body by connection portions where connection surfaces each of which is part of a surface of each wall member are hermetically connected to each other, and at least part of the connection portions are built-in gap type connection portions each of which has a gap extending along the corresponding connection surfaces inside the connection surfaces and in which peripheries of the connection surfaces are hermetically connected to each other by welding.
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