发明申请
- 专利标题: ALIGNMENT FOR BACKSIDE ILLUMINATION SENSOR
- 专利标题(中): 背面照明传感器对准
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申请号: US12553586申请日: 2009-09-03
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公开(公告)号: US20090321888A1公开(公告)日: 2009-12-31
- 发明人: Jen-Cheng Liu , Dun-Nian Yaung , Shou-Gwo Wuu
- 申请人: Jen-Cheng Liu , Dun-Nian Yaung , Shou-Gwo Wuu
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L23/544
- IPC分类号: H01L23/544
摘要:
Provided is an apparatus that includes an integrated circuit located in a first region of a substrate having first and second opposing major surfaces and an alignment mark located in a second region of the substrate and extending through the substrate between the first and second surfaces.
公开/授权文献
- US08227899B2 Alignment for backside illumination sensor 公开/授权日:2012-07-24