发明申请
- 专利标题： SENSOR AND ITS FABRICATION PROCESS
- 专利标题（中）： 传感器及其制造工艺
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申请号： US12495012申请日： 2009-06-30
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公开(公告)号： US20100005886A1公开(公告)日： 2010-01-14
- 发明人: Kazuhiko Aida , Katsumi Hashimoto , Toshiaki Mori
- 申请人： Kazuhiko Aida , Katsumi Hashimoto , Toshiaki Mori
- 申请人地址： JP Shinjuk-ku
- 专利权人： DAI NIPPON PRINTING CO., LTD.
- 当前专利权人： DAI NIPPON PRINTING CO., LTD.
- 当前专利权人地址： JP Shinjuk-ku
- 优先权： JP2008-181039 20080711
- 主分类号： G01P15/09
- IPC分类号： G01P15/09 ; H04R17/00
摘要：
The invention provides a sensor comprising a frame, a plurality of beams extending inwardly from said frame, a weight portion supported by the beams, a piezoelectric-resistor formed on each beam and an insulating layer that covers the piezoelectric-resistor. The piezoelectric-resistor has at least one bend, and a metal wiring is located on the insulting layer positioned at the bend. The metal wiring is connected to the bend via at least two contact holes formed in the insulating layer. Contact holes are formed in the insulating layer positioned at both ends of the piezoelectric-resistor, and a bridge circuit wiring is connected to the piezoelectric-resistor via the contact holes.
公开/授权文献
- US08387458B2 Sensor having improved thermal stability 公开/授权日：2013-03-05
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