发明申请
- 专利标题: CERAMIC PRESSURE SENSORS AND METHOD FOR PRODUCING THE SAME
- 专利标题(中): 陶瓷压力传感器及其制造方法
-
申请号: US12296604申请日: 2007-04-05
-
公开(公告)号: US20100005894A1公开(公告)日: 2010-01-14
- 发明人: Uwe Partsch
- 申请人: Uwe Partsch
- 优先权: DE102006018049.6 20060410
- 国际申请: PCT/EP2007/053415 WO 20070405
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; B28B1/26
摘要:
The invention relates to the field of multilayer ceramics and relates to ceramic pressure sensors, such as can be used, for example, for industrial process control. The object of the invention is to disclose ceramic pressure sensors that are mounted in a largely mechanically stress-free manner and have a long service life, and the production of which is more effective and more cost-effective. The object is attained with ceramic pressure sensors, comprising a support of tapes, wherein the tape(s) embody at least one cavity that is covered with at least one ceramic pressure membrane tape or in which a ceramic pressure membrane tape covering the cavity is located, and wherein the tape(s) have at least one supply line for the pressure connection to the cavity, and the tape composite is sintered. The object is further attained with a method for production, in which at least one tape is structured for producing a cavity, at least one pressure membrane tape is positioned on the cavity for covering, and subsequently the tape composite is sintered.
公开/授权文献
- US08079268B2 Ceramic pressure sensors and method for producing the same 公开/授权日:2011-12-20
信息查询