发明申请
US20100006540A1 METHOD OF MANUFACTURING A MICROMECHANICAL PART 有权
制造微生物部件的方法

METHOD OF MANUFACTURING A MICROMECHANICAL PART
摘要:
The invention relates to a method of manufacturing (1) a mechanical part (51) including the following steps:a) providing (3) a substrate (53) made of micro-machinable material;b) etching (5), with help of photolithography, a pattern (50) that includes said part through said entire substrate;According to the invention, the method further includes the following steps:c) mounting (7) said etched substrate on a support (55′) so as to leave the top and bottom surfaces of said substrate accessible;d) depositing (9, C′) a coating of better tribological quality than said micro-machinable material on the outer surface of said part e) releasing (11) the part from the substrate. The invention concerns the field of timepiece manufacture.
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