Invention Application
- Patent Title: Vibrating Mirror Element
- Patent Title (中): 振动镜元件
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Application No.: US12503511Application Date: 2009-07-15
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Publication No.: US20100014143A1Publication Date: 2010-01-21
- Inventor: Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
- Applicant: Isaku Kanno , Hidetoshi Kotera , Manabu Murayama , Hitoshi Fujii
- Applicant Address: JP Daito-shi
- Assignee: Funai Electric Co., Ltd.
- Current Assignee: Funai Electric Co., Ltd.
- Current Assignee Address: JP Daito-shi
- Priority: JP2008-184913 20080716
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10
Abstract:
A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.
Public/Granted literature
- US08098415B2 Vibrating mirror element Public/Granted day:2012-01-17
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