发明申请
- 专利标题: Sintered Silicon Wafer
- 专利标题(中): 烧结硅片
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申请号: US12522959申请日: 2008-07-04
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公开(公告)号: US20100016144A1公开(公告)日: 2010-01-21
- 发明人: Ryo Suzuki , Hiroshi Takamura
- 申请人: Ryo Suzuki , Hiroshi Takamura
- 申请人地址: JP Tokyo
- 专利权人: NIPPON MINING & METALS CO., LTD.
- 当前专利权人: NIPPON MINING & METALS CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-184758 20070713
- 国际申请: PCT/JP2008/062174 WO 20080704
- 主分类号: C04B35/565
- IPC分类号: C04B35/565
摘要:
Provided is a sintered silicon wafer, wherein the volume ratio of silicon oxide contained in the wafer is 0.01% or more and 0.2% or less, the volume ratio of silicon carbide is 0.01% or more and 0.15% or less, and the volume ratio of metal silicide is 0.006% or less. Additionally provided is a sintered silicon wafer having a diameter of 400 mm or more and having the following mechanical properties (1) to (3) measured by collecting a plurality of test samples from the sintered silicon wafers: (1) average value of the deflecting strength based on a three-point bending test is 20 kgf/mm2 or more and 50 kgf/mm2 or less; (2) average value of the tensile strength is 5 kgf/mm2 or more and 20 kgf/mm2 or less; and (3) average value of the Vickers hardness is Hv 800 or more and Hv 1200 or less. Even in the case of a large disk-shaped sintered silicon wafer, it is possible to provide a sintered compact wafer having definite strength and similar mechanical properties as single crystal silicon.