发明申请
- 专利标题: COMPLEMENTARY BIPOLAR SEMICONDUCTOR DEVICE
- 专利标题(中): 补充双极半导体器件
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申请号: US12448032申请日: 2007-12-07
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公开(公告)号: US20100019326A1公开(公告)日: 2010-01-28
- 发明人: Dieter Knoll , Bernd Heinemann , Karl-Ernst Ehwald
- 申请人: Dieter Knoll , Bernd Heinemann , Karl-Ernst Ehwald
- 优先权: DE102006059113.5 20061208
- 国际申请: PCT/EP2007/063551 WO 20071207
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L21/8249
摘要:
A complementary bipolar semiconductor device (CBi semiconductor device) comprising a substrate of a first conductivity type, active bipolar transistor regions in the substrate, in which the base, emitter and collector of vertical bipolar transistors are arranged, vertical epitaxial-base npn bipolar transistors in a first subset of the active bipolar transistor regions, vertical epitaxial-base pnp bipolar transistors in a second subset of the active bipolar transistor regions, collector contact regions which are respectively arranged adjoining an active bipolar transistor region, and shallow field insulation regions which respectively laterally delimit the active bipolar transistor regions and the collector contact regions, wherein arranged between the first or the second or both the first and also the second subset of active bipolar transistor regions on the one hand and the adjoining collector contact regions on the other hand is a respective shallow field insulation region of a first type with a first depthwise extent in the direction of the substrate interior and shallow field insulation regions of a second type of a second greater depthwise extent than the first depthwise extent of the active bipolar transistor regions delimit the active bipolar transistor regions and collector contact regions viewed in cross-section at their sides facing away from each other.
公开/授权文献
- US08035167B2 Complementary bipolar semiconductor device 公开/授权日:2011-10-11
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