发明申请
US20100019331A1 HALL-EFFECT MAGNETIC SENSORS WITH IMPROVED MAGNETIC RESPONSIVITY AND METHODS FOR MANUFACTURING THE SAME 有权
具有改进的磁性响应的霍尔效应磁传感器及其制造方法

  • 专利标题: HALL-EFFECT MAGNETIC SENSORS WITH IMPROVED MAGNETIC RESPONSIVITY AND METHODS FOR MANUFACTURING THE SAME
  • 专利标题(中): 具有改进的磁性响应的霍尔效应磁传感器及其制造方法
  • 申请号: US12178144
    申请日: 2008-07-23
  • 公开(公告)号: US20100019331A1
    公开(公告)日: 2010-01-28
  • 发明人: Wayne Kilian
  • 申请人: Wayne Kilian
  • 专利权人: Honeywell International Inc.
  • 当前专利权人: Honeywell International Inc.
  • 主分类号: H01L43/06
  • IPC分类号: H01L43/06
HALL-EFFECT MAGNETIC SENSORS WITH IMPROVED MAGNETIC RESPONSIVITY AND METHODS FOR MANUFACTURING THE SAME
摘要:
A Hall-effect magnetic sensor comprises a p-type Hall element and an n-type epitaxial Hall element. The p-type element can be implanted directly on top of the n-type element. The merged Hall elements can be biased in parallel to provide a nearly zero-bias depletion layer throughout for isolation. Electrical contacts to the n-type element can be diffused down through the p-type element and positioned to partially obstruct current flow in the p-type element. Electrical contacts can be diffused into the p-type element. Each bias contact of the p-type element can be connected to respective bias contacts of the n-type element in a parallel fashion. Then, an output signal can be taken at the sense contacts of the n-type element in order to provide improved magnetic responsivity. Further provided is a method for manufacturing the Hall-effect magnetic sensor.
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