发明申请
US20100019620A1 PIEZOCERAMIC MULTILAYER ACTUATOR AND METHOD FOR ITS PRODUCTION
有权
PIEZOCERAMIC MULTILAYER执行器及其生产方法
- 专利标题： PIEZOCERAMIC MULTILAYER ACTUATOR AND METHOD FOR ITS PRODUCTION
- 专利标题（中）： PIEZOCERAMIC MULTILAYER执行器及其生产方法
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申请号： US12520888申请日： 2007-12-19
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公开(公告)号： US20100019620A1公开(公告)日： 2010-01-28
- 发明人: Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
- 申请人： Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
- 优先权： DE102006062076.3 20061229
- 国际申请： PCT/EP07/64250 WO 20071219
- 主分类号： H01L41/04
- IPC分类号： H01L41/04 ; H01L41/22
摘要：
In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behaviour similar to the multilayer actuator (1) without poling cracks.
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