发明申请
US20100025237A1 DEPOSITION APPARATUS FOR ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE
审中-公开
用于有机电致发光显示器件的沉积装置
- 专利标题: DEPOSITION APPARATUS FOR ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE
- 专利标题(中): 用于有机电致发光显示器件的沉积装置
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申请号: US12540864申请日: 2009-08-13
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公开(公告)号: US20100025237A1公开(公告)日: 2010-02-04
- 发明人: Jongsung Kim , Minki Kim
- 申请人: Jongsung Kim , Minki Kim
- 优先权: KR10-2009-0004844 19990121
- 主分类号: C25B11/00
- IPC分类号: C25B11/00
摘要:
An embodiment of this document provides a deposition apparatus for an organic electroluminescent display device, comprising a vacuum chamber, a deposition source placed on a bottom within the vacuum chamber, a mask configured to mask a source generated by the deposition source, a target substrate on which the source passing through the mask is deposited, a first plate placed on an upper side within the vacuum chamber, wherein magnets are arranged with them being spaced apart from each other on one side of the first plate, and a second plate placed below the first plate, wherein grooves into which the respective magnets are inserted are formed in the second plate.
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