发明申请
- 专利标题: IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 图像传感器及其制造方法
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申请号: US12508846申请日: 2009-07-24
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公开(公告)号: US20100025584A1公开(公告)日: 2010-02-04
- 发明人: Keita SASAKI , Hideyuki Funaki , Hiroto Honda , Ikuo Fujiwara , Koichi Ishii , Hitoshi Yagi
- 申请人: Keita SASAKI , Hideyuki Funaki , Hiroto Honda , Ikuo Fujiwara , Koichi Ishii , Hitoshi Yagi
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-196027 20080730
- 主分类号: H01L31/02
- IPC分类号: H01L31/02 ; H01L31/00
摘要:
An image sensor includes a semiconductor substrate; first pixels laid out above cavities provided within the semiconductor substrate, the first pixels converting thermal energy generated by incident light into an electric signal; supporting parts connected between the first pixels and the semiconductor substrate, the supporting parts supporting the first pixels above the cavities; and second pixels fixedly provided on the semiconductor substrate without via the cavities, wherein a plurality of the first pixels and a plurality of the second pixels are laid out two-dimensionally to form a pixel region, and each of the second pixels is adjacent to the first pixels.
公开/授权文献
- US08067740B2 Image sensor and manufacturing method thereof 公开/授权日:2011-11-29