发明申请
- 专利标题： PROBES FOR SCANNING PROBE MICROSCOPY
- 专利标题（中）： 扫描探针显微镜探针
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申请号： US12248652申请日： 2008-10-09
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公开(公告)号： US20100032719A1公开(公告)日： 2010-02-11
- 发明人: Seunghun HONG , Taekyeong KIM
- 申请人： Seunghun HONG , Taekyeong KIM
- 优先权： KR10-2008-0078047 20080808
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L29/205
摘要：
Disclosed are probes for scanning probe microscopy comprising a semiconductor heterostructure and methods of making the probes. The semiconductor heterostructure determines the optical properties of the probe and allows for optical imaging with nanometer resolution.
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