发明申请
- 专利标题: COATING AND PROCESSING APPARATUS AND METHOD
- 专利标题(中): 涂料和加工设备和方法
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申请号: US12569988申请日: 2009-09-30
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公开(公告)号: US20100034969A1公开(公告)日: 2010-02-11
- 发明人: Shinji KOBAYASHI , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
- 申请人: Shinji KOBAYASHI , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
- 优先权: JP2003-063851 20030310
- 主分类号: B05D3/12
- IPC分类号: B05D3/12
摘要:
There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.
公开/授权文献
- US08277884B2 Coating and processing apparatus and method 公开/授权日:2012-10-02