发明申请
- 专利标题: Back-End-of-Line Resistive Semiconductor Structures
- 专利标题(中): 后端电阻半导体结构
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申请号: US12191683申请日: 2008-08-14
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公开(公告)号: US20100038754A1公开(公告)日: 2010-02-18
- 发明人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Robert Robison , Yun Shi , William R. Tonti
- 申请人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Robert Robison , Yun Shi , William R. Tonti
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
In one embodiment, a back-end-of-line (BEOL) resistive structure comprises a second metal line embedded in a second dielectric layer and overlying a first metal line embedded in a first dielectric layer. A doped semiconductor spacer or plug laterally abutting sidewalls of the second metal line and vertically abutting a top surface of the first metal line provides a resistive link between the first and second metal lines. In another embodiment, another BEOL resistive structure comprises a first metal line and a second metal line are embedded in a dielectric layer. A doped semiconductor spacer or plug laterally abutting the sidewalls of the first and second metal lines provides a resistive link between the first and second metal lines.
公开/授权文献
- US07939911B2 Back-end-of-line resistive semiconductor structures 公开/授权日:2011-05-10
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