发明申请
US20100044913A1 METHOD FOR PRODUCING SURFACE CONVEXES AND CONCAVES 失效
生产表面腐蚀和腐蚀的方法

  • 专利标题: METHOD FOR PRODUCING SURFACE CONVEXES AND CONCAVES
  • 专利标题(中): 生产表面腐蚀和腐蚀的方法
  • 申请号: US12530992
    申请日: 2008-03-19
  • 公开(公告)号: US20100044913A1
    公开(公告)日: 2010-02-25
  • 发明人: Hideki Etori
  • 申请人: Hideki Etori
  • 申请人地址: JP TOKYO
  • 专利权人: KIMOTO CO., LTD.
  • 当前专利权人: KIMOTO CO., LTD.
  • 当前专利权人地址: JP TOKYO
  • 优先权: JP2007-078291 20070326
  • 国际申请: PCT/JP2008/055092 WO 20080319
  • 主分类号: B29C33/42
  • IPC分类号: B29C33/42 G03F7/20
METHOD FOR PRODUCING SURFACE CONVEXES AND CONCAVES
摘要:
A method for producing surface convexes or concaves enabling easy and highly precise formation of desired convex/concave shapes using a photomask is provided.A mask member 20 having light transmitting sections and non-light transmitting sections is disposed over one side of a photosensitive film 10 consisting of a photosensitive resin composition with an interval with respect to the photosensitive film 10, and a light diffusing member 30 is disposed on the opposite side of the photosensitive film 10 across the mask member 20. Light is irradiated from a light source disposed on the opposite side of the mask member 20 across the light diffusing member 30 to subject the photosensitive film 10 to light exposure through the light diffusing member 30 and the light transmitting sections of the mask member 20. Exposed portions or unexposed portions of the photosensitive film 10 are removed by development to produce convexes or concaves on the photosensitive film 10 in shapes determined by shapes of the exposed portions or unexposed portions. In the light exposure, light exposure conditions such as haze of the light diffusing member 30 are controlled to control the shapes of the exposed portions or unexposed portions.
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