发明申请
- 专利标题: COPOLYMER FOR IMMERSION LITHOGRAPHY AND COMPOSITIONS
- 专利标题(中): 用于渗透层析和组合物的共聚物
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申请号: US12445948申请日: 2007-10-30
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公开(公告)号: US20100047710A1公开(公告)日: 2010-02-25
- 发明人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人地址: JP Chuo-ku
- 专利权人: Maruzen Petrochemical Co., Ltd
- 当前专利权人: Maruzen Petrochemical Co., Ltd
- 当前专利权人地址: JP Chuo-ku
- 优先权: JP2006-301462 20061107
- 国际申请: PCT/JP07/01183 WO 20071030
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C08G63/08
摘要:
The present invention provides a copolymer which can prevent problems associated with immersion lithography (including occurrence of a pattern defect such as water mark, and variation in sensitivity or abnormal patterning due to elution of an additive such as a radiation-sensitive acid-generator) and which provides surface characteristics suitable for immersion lithography, and a composition containing the copolymer.The copolymer for immersion lithography has, at least, a repeating unit (A) that generates an alkali-soluble group by removing protecting group through action of an acid, and a repeating unit (B) having a lactone structure, wherein, when a solution of the copolymer in propylene glycol monomethyl ether acetate (hereinafter may be abbreviated as “PGMEA”) is applied to a wafer and then heated to form a thin film, and a 15-μL droplet of pure water is added onto the thin film, the inclination of the wafer at the time when the water droplet starts to move is 35° or less, or the contact angle of the top edge of the water droplet at the time when the water droplet starts to move is 64° or more.
公开/授权文献
- US08211615B2 Copolymer for immersion lithography and compositions 公开/授权日:2012-07-03
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