发明申请
US20100052250A1 CARRIER DEVICE, INSPECTION APPARATUS HAVING THE SAME, AND INSPECTION SYSTEM 审中-公开
承运人装置,检查装置和检查系统

CARRIER DEVICE, INSPECTION APPARATUS HAVING THE SAME, AND INSPECTION SYSTEM
摘要:
A carrier device performs floating and carrying of a sheet-like member having curling tendency along a carrier path. The carrier device includes a floating air blowing unit that floats and carries the sheet-like member by blowing out air obliquely upward in a carrying direction to the sheet-like member residing on the carrier path via a plurality of blowout holes, a carrier plate that constitutes the carrier path and has the plurality of blowout holes formed therein, and a pressing air blowing unit that faces a carrying start position of the sheet-like member on the carrier plate and blows out air from an upper position relative to the sheet-like member so as to lay the sheet-like member along the carrier plate.
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