发明申请
- 专利标题: Probe Card
- 专利标题(中): 探头卡
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申请号: US12086008申请日: 2006-12-04
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公开(公告)号: US20100052707A1公开(公告)日: 2010-03-04
- 发明人: Hiroshi Nakayama , Mitsuhiro Nagaya , Yoshio Yamada
- 申请人: Hiroshi Nakayama , Mitsuhiro Nagaya , Yoshio Yamada
- 申请人地址: JP Kanagawa
- 专利权人: NHK Spring Co.,Ltd
- 当前专利权人: NHK Spring Co.,Ltd
- 当前专利权人地址: JP Kanagawa
- 国际申请: PCT/JP2006/324184 WO 20061204
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe card includes probes that come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that reinforces the substrate; an interposer that is stacked on the substrate and includes a housing having connection terminals resilient in an axial direction thereof and hole portions each housing one of the connection terminals; and a space transformer that is stacked between the interposer and the probe head and transforms intervals among the wires.
公开/授权文献
- US08149006B2 Probe card 公开/授权日:2012-04-03
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