发明申请
- 专利标题: Electroless Deposition of Platinum on Copper
- 专利标题(中): 铂在铜上的化学沉积
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申请号: US12200841申请日: 2008-08-28
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公开(公告)号: US20100055422A1公开(公告)日: 2010-03-04
- 发明人: Bob Kong , Zhi-Wen Sun , Igor Ivanov , Jinhong Tong
- 申请人: Bob Kong , Zhi-Wen Sun , Igor Ivanov , Jinhong Tong
- 主分类号: B32B3/10
- IPC分类号: B32B3/10 ; C23C18/44 ; H01L21/44
摘要:
Embodiments of the current invention describe a method of plating platinum selectively on a copper film using a self-initiated electroless process. In particular, platinum films are plated onto very thin copper films having a thickness of less than 300 angstroms. The electroless plating solution and the resulting structure are also described. This process has applications in the semiconductor processing of logic devices, memory devices, and photovoltaic devices.
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