发明申请
US20100055422A1 Electroless Deposition of Platinum on Copper 审中-公开
铂在铜上的化学沉积

Electroless Deposition of Platinum on Copper
摘要:
Embodiments of the current invention describe a method of plating platinum selectively on a copper film using a self-initiated electroless process. In particular, platinum films are plated onto very thin copper films having a thickness of less than 300 angstroms. The electroless plating solution and the resulting structure are also described. This process has applications in the semiconductor processing of logic devices, memory devices, and photovoltaic devices.
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