发明申请
- 专利标题: Methods of manufacturing CMOS image sensors
- 专利标题(中): CMOS图像传感器的制造方法
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申请号: US12461903申请日: 2009-08-27
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公开(公告)号: US20100055823A1公开(公告)日: 2010-03-04
- 发明人: Ui-Sik Kim , Young-Hoon Park , Won-Je Park , Dae-Cheol Seong , Yeo-Ju Yoon , Bo-Bae Kang
- 申请人: Ui-Sik Kim , Young-Hoon Park , Won-Je Park , Dae-Cheol Seong , Yeo-Ju Yoon , Bo-Bae Kang
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2008-0084618 20080828
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
Complementary metal-oxide semiconductor (CMOS) image sensors (CIS) and methods of manufacturing the same are provided, the sensors include an epitaxial layer on a substrate in which a first, second, third and fourth region are defined. A photodiode may be formed at an upper portion of the epitaxial layer in the first region. A plurality of gate structures may be formed on the epitaxial layer in the second, third and fourth regions. A first blocking layer may be formed on the gate structures and the epitaxial layer in the first and second regions. A first impurity layer may be formed at an upper portion of the epitaxial layer adjacent to the gate structures in the second region, and a second impurity layer at upper portions of the epitaxial layer adjacent to the gate structures in the third and fourth regions. A color filter layer may be formed over the photodiode. A microlens may be formed on the color filter layer.
公开/授权文献
- US07932120B2 Methods of manufacturing CMOS image sensors 公开/授权日:2011-04-26
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