发明申请
- 专利标题: MECHANISM FOR DETECTING SHAFT MOTION, AND CONDITIONER HEAD
- 专利标题(中): 用于检测轴运动的机构和调节器头
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申请号: US12549270申请日: 2009-08-27
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公开(公告)号: US20100056030A1公开(公告)日: 2010-03-04
- 发明人: Toshikazu TOMITA
- 申请人: Toshikazu TOMITA
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 优先权: JPP2008-221969 20080829
- 主分类号: B24B53/02
- IPC分类号: B24B53/02 ; G01B7/30
摘要:
To provide a shaft motion detection mechanism capable of detecting the displacement of a rotating body in a direction along a rotational axis and whether or not the rotating body is rotated, and a conditioner head capable of detecting the displacement of a polishing disk in a direction along a rotational axis and whether or not the polishing disk is rotated. A conditioner head 10 has a shaft 18 rotating around a rotational axis C, a cylindrical shaft 19 attached to the shaft 18 so as to be displaced along the rotational axis C, a frame 16 rotatably supporting the shaft 19, a plurality of projections 18c formed on the surface of the shaft 18 so as to be aligned in a circumferential direction, a projection 18d formed throughout the entire circumference on the surface of the shaft 18, and proximity sensors 30a to 30c arranged around the rotational axis C so as to face the shaft 18. The angle formed around the rotational axis C by the proximity sensors 30a and 30c is larger than the angle formed around the rotational axis C by the circumferential width of each projection 18c and the angle formed around the rotational axis C by the space between the projections 18c.
公开/授权文献
- US08251775B2 Mechanism and method for detecting the motion of a shaft 公开/授权日:2012-08-28
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