发明申请
US20100058583A1 METHOD OF MANUFACTURING IMPLANTABLE WIRELESS SENSOR FOR IN VIVO PRESSURE MEASUREMENT 有权
用于血压测量的可植入式无线传感器的制造方法

METHOD OF MANUFACTURING IMPLANTABLE WIRELESS SENSOR FOR IN VIVO PRESSURE MEASUREMENT
摘要:
A method of manufacturing a sensor for in vivo applications includes the steps of providing two wafers of an electrically insulating material. A recess is formed in the first wafer, and a capacitor plate is formed in the recess of the first wafer. A second capacitor plate is formed in a corresponding region of the second wafer, and the two wafers are affixed to one another such that the first and second capacitor plates are arranged in parallel, spaced-apart relation.
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