发明申请
- 专利标题: PLASMA GENERATOR AND METHOD FOR CLEANING AN OBJECT
- 专利标题(中): 等离子体发生器和清洁对象的方法
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申请号: US12520327申请日: 2007-12-21
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公开(公告)号: US20100059085A1公开(公告)日: 2010-03-11
- 发明人: Fokko Pieter Wieringa , Norbertus Benedictus Koster , Roland van Vliet , Hubert Adriaan van Mierlo
- 申请人: Fokko Pieter Wieringa , Norbertus Benedictus Koster , Roland van Vliet , Hubert Adriaan van Mierlo
- 申请人地址: NL Delft
- 专利权人: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETEN
- 当前专利权人: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETEN
- 当前专利权人地址: NL Delft
- 优先权: EP06077298.5 20061221
- 国际申请: PCT/NL2007/050696 WO 20071221
- 主分类号: B08B6/00
- IPC分类号: B08B6/00
摘要:
The invention relates to a plasma generator (1) for cleaning an object. The plasma generator (1) comprises a plasma chamber (2) and a support structure (6) arranged in the plasma chamber for supporting the object (7) to be cleaned. Further, the plasma generator comprises an electromagnetic shield (5a, 5b, 5c) counteracting a flow of charged plasma particles flowing from a plasma generating region towards the object, and a plasma source (8). In addition, the plasma generator comprises an additional plasma source (9,10) to form a composition of plasma sources that are arranged to generate in the plasma generating region plasmas, respectively, that mutually interact during operation of the plasma generator so as to force plasma particles to flow in a diffusely closed flow path.
公开/授权文献
- US08961694B2 Plasma generator and method for cleaning an object 公开/授权日:2015-02-24
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