发明申请
- 专利标题: POLYMERIZABLE SULFONIC ACID ONIUM SALT AND RESIN
- 专利标题(中): 可聚合磺酸钠盐和树脂
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申请号: US12514168申请日: 2007-11-09
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公开(公告)号: US20100063232A1公开(公告)日: 2010-03-11
- 发明人: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- 申请人: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- 申请人地址: JP Tokyo JP Ube-shi
- 专利权人: JSR CORPORATION,CENTRAL GLASS CO., LTD.
- 当前专利权人: JSR CORPORATION,CENTRAL GLASS CO., LTD.
- 当前专利权人地址: JP Tokyo JP Ube-shi
- 优先权: JP2006-305842 20061110
- 国际申请: PCT/JP2007/071849 WO 20071109
- 主分类号: C08F28/02
- IPC分类号: C08F28/02 ; C07C69/533
摘要:
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
公开/授权文献
- US07956142B2 Polymerizable sulfonic acid onium salt and resin 公开/授权日:2011-06-07
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