发明申请
US20100063232A1 POLYMERIZABLE SULFONIC ACID ONIUM SALT AND RESIN 有权
可聚合磺酸钠盐和树脂

POLYMERIZABLE SULFONIC ACID ONIUM SALT AND RESIN
摘要:
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
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