发明申请
- 专利标题: RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING LOW MOLECULAR WEIGHT DISSOLUTION ACCELERATOR
- 专利标题(中): 含低分子重量分解加速器的耐下胶膜成型组合物
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申请号: US12448130申请日: 2007-12-11
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公开(公告)号: US20100075253A1公开(公告)日: 2010-03-25
- 发明人: Masakazu Kato , Takahiro Hamada , Tomoyuki Enomoto
- 申请人: Masakazu Kato , Takahiro Hamada , Tomoyuki Enomoto
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES , LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES , LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-335723 20061213
- 国际申请: PCT/JP2007/073860 WO 20071211
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004
摘要:
There is provided a resist underlayer film forming composition that is used in a lithography process for the production of semiconductor devices and that can be developed with an alkaline developer for photoresists, and a method of forming a photoresist pattern by using the resist underlayer film forming composition. The resist underlayer film forming composition used in a lithography process for a production of a semiconductor device comprising: an alkali-soluble resin (a); a polynuclear phenol (b); a compound (c) having at least two vinylether groups; and a photoacid generator (d). The alkali-soluble resin (a) may be a polymer containing a unit structure having a carboxyl group, and the polynuclear phenol (b) may be a compound having 2 to 30 phenolic hydroxyl groups in the molecule.
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