发明申请
- 专利标题: SEMICONDUCTOR DEVICE WITH A CHARGE CARRIER COMPENSATION STRUCTURE AND METHOD FOR THE PRODUCTION OF A SEMICONDUCTOR DEVICE
- 专利标题(中): 具有充电载体补偿结构的半导体器件和用于制造半导体器件的方法
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申请号: US12241985申请日: 2008-09-30
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公开(公告)号: US20100078775A1公开(公告)日: 2010-04-01
- 发明人: Anton Mauder , Franz Hirler , Armin Willmeroth , Michael Rueb , Holger Kapels
- 申请人: Anton Mauder , Franz Hirler , Armin Willmeroth , Michael Rueb , Holger Kapels
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L29/06
摘要:
A semiconductor device has a cell field with drift zones of a first type of conductivity and charge carrier compensation zones of a second type of conductivity complementary to the first type. An edge region which surrounds the cell field has a higher blocking strength than the cell field, the edge region having a near-surface area which is undoped to more weakly doped than the drift zones, and beneath the near-surface area at least one buried, vertically extending complementarily doped zone is positioned.
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