发明申请
- 专利标题: Methods for Measuring Dielectric Properties of Parts
- 专利标题(中): 测量零件介电性能的方法
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申请号: US12240375申请日: 2008-09-29
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公开(公告)号: US20100079152A1公开(公告)日: 2010-04-01
- 发明人: Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
- 申请人: Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; G01R35/00 ; G01R27/28
摘要:
A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.
公开/授权文献
- US07911213B2 Methods for measuring dielectric properties of parts 公开/授权日:2011-03-22