发明申请
- 专利标题: Electrical Fuse Structure and Method
- 专利标题(中): 电气保险丝结构与方法
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申请号: US12637510申请日: 2009-12-14
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公开(公告)号: US20100090751A1公开(公告)日: 2010-04-15
- 发明人: Hsin-Li Cheng , Chia-Jung Lee , Chin-Shan Hou , Wei-Ming Chen
- 申请人: Hsin-Li Cheng , Chia-Jung Lee , Chin-Shan Hou , Wei-Ming Chen
- 主分类号: H01H85/00
- IPC分类号: H01H85/00 ; H01L23/525
摘要:
An electrical fuse and a process of programming the same are presented. An electrical fuse comprises a lower level silicide layer on a non-doped or lightly-doped polysilicon layer, an upper level conductive layer, and a tungsten contact coupled between the lower level silicide layer and the upper level conductive layer. The tungsten contact and a neck portion of the silicide layer are the programmable portion of the electrical fuse. High post-programming resistance is achieved by a first programming phase that depletes silicide in the silicide layer, followed by a second programming phase that depletes tungsten in the tungsten contact.