发明申请
US20100093171A1 FABRICATION CUBIC BORON NITRIDE CONE-MICROSTRUCTURES AND THEIR ARRAYS
有权
制造CUBIC BORON NITRIDE CONE-MICROSTRURES和它们的阵列
- 专利标题： FABRICATION CUBIC BORON NITRIDE CONE-MICROSTRUCTURES AND THEIR ARRAYS
- 专利标题（中）： 制造CUBIC BORON NITRIDE CONE-MICROSTRURES和它们的阵列
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申请号： US12250716申请日： 2008-10-14
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公开(公告)号： US20100093171A1公开(公告)日： 2010-04-15
- 发明人: Wen-Jun Zhang , Igor Bello , Shuit-Tong Lee , You-Sheng Zou , Yat Ming Chong , Qing Ye
- 申请人： Wen-Jun Zhang , Igor Bello , Shuit-Tong Lee , You-Sheng Zou , Yat Ming Chong , Qing Ye
- 申请人地址： HK Kowloon Tong, Kowloon
- 专利权人： CITY UNIVERSITY OF HONG KONG
- 当前专利权人： CITY UNIVERSITY OF HONG KONG
- 当前专利权人地址： HK Kowloon Tong, Kowloon
- 主分类号： H01L21/306
- IPC分类号： H01L21/306 ; B44C1/22
摘要：
A conical structure of cubic Boron Nitride (cBN) is formed on a diamond layered substrate. A method of forming the cBN structure includes steps of (a) forming diamond nuclei on a substrate, (b) growing a layer of diamond film on the substrate, (c) depositing a cBN film on said diamond layer, (d) pre-depositing nanoscale etching masks on the the cBN film, and (e) etching the the deposited cBN film. In particular, though not exclusively, the cubic Boron Nitride structure has great potential applications in probe analytical and testing techniques including scanning probe microscopy (SPM) and nanoindentation, nanomechanics and nanomachining in progressing microelectromechanical system (MEMS) and nanoelectyromechanical system (NEMS) devices, field electron emission, vacuum microelectronic devices, sensors and different electrode systems including those used in electrochemistry.
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