发明申请
- 专利标题： SUPERCONDUCTING STRUCTURE, APPARATUS FOR PROCESSING SUPERCONDUCTING STRUCTURE, AND METHOD FOR PROCESSING SUPERCONDUCTING STRUCTURE
- 专利标题（中）： 超导结构，加工超导结构的装置及加工超导结构的方法
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申请号： US12631777申请日： 2009-12-04
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公开(公告)号： US20100093548A1公开(公告)日： 2010-04-15
- 发明人: Akira KAWAKAMI
- 申请人： Akira KAWAKAMI
- 主分类号： H01L39/24
- IPC分类号： H01L39/24
摘要：
A superconducting structure includes an NbN thin-film as a first superconducting thin-film layer on the upper surface of a substrate, an NbN thin-film as a second superconducting thin-film layer above the NbN thin-film, and a MgO thin-film as a protective thin-film provided between the NbN thin-film and the NbN thin-film.
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