发明申请
US20100095888A1 PLASMA GENERATING APPARATUS AND PLASMA FILM FORMING APPARATUS
审中-公开
等离子体生成装置和等离子体膜形成装置
- 专利标题: PLASMA GENERATING APPARATUS AND PLASMA FILM FORMING APPARATUS
- 专利标题(中): 等离子体生成装置和等离子体膜形成装置
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申请号: US12531264申请日: 2008-03-28
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公开(公告)号: US20100095888A1公开(公告)日: 2010-04-22
- 发明人: Yasunari Mori , Kazuki Takizawa
- 申请人: Yasunari Mori , Kazuki Takizawa
- 申请人地址: JP Tokyo
- 专利权人: MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
- 当前专利权人: MITSUI ENGINEERING & SHIPBUILDING CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-091402 20070330
- 国际申请: PCT/JP2008/056063 WO 20080328
- 主分类号: C23C16/52
- IPC分类号: C23C16/52 ; H05H1/46
摘要:
A plasma generating apparatus is provided with an impedance matching member, which is connected to a feeding line that supplies an antenna element with a high frequency signal, and has variable characteristic parameters for impedance matching; a distribution wire, which is arranged corresponding to the impedance matching member and connects the impedance matching member with at least two antenna elements; and a control section which changes at the same time impedance matching statuses of at least the two antenna elements connected to the impedance matching member through the distribution wire by changing the characteristic parameters of the impedance member. Thus, the number of impedance matching devices is smaller than that of the antenna elements, and a mechanism relating to impedance matching is made relatively small.
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