发明申请
US20100096085A1 PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS
有权
具有带电压下降元件继电器的天花板电极管的等离子体反应器
- 专利标题： PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS
- 专利标题（中）： 具有带电压下降元件继电器的天花板电极管的等离子体反应器
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申请号： US12255492申请日： 2008-10-21
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公开(公告)号： US20100096085A1公开(公告)日： 2010-04-22
- 发明人: OLKAN CUVALCI , Yu Chang , William Kuang , Anqing Cui , Seshadri Ganguli
- 申请人： OLKAN CUVALCI , Yu Chang , William Kuang , Anqing Cui , Seshadri Ganguli
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： C23F1/08
- IPC分类号： C23F1/08 ; C23C16/44
摘要：
A bridge assembly includes an electrically insulating hollow tube or bridge having a pair of ends, the bridge being supported at one of the ends over the cylindrical side wall and being supported at the other of the ends over the electrode. The bridge assembly further includes a set of conductive rings surrounding the hollow tube and spaced from one another along the length of the bridge, and plural electrically resistive elements. Each of the resistive elements has a pair of flexible connectors, respective ones the resistive elements connected at their flexible connectors between respective pairs of the rings to form a series resistor assembly.