发明申请
- 专利标题: HIGH PERFORMANCE ONE-TRANSISTOR DRAM CELL DEVICE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 高性能单晶体管DRAM器件及其制造方法
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申请号: US12200929申请日: 2008-08-28
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公开(公告)号: US20100102372A1公开(公告)日: 2010-04-29
- 发明人: Jong-Ho Lee , Ki-Heung Park
- 申请人: Jong-Ho Lee , Ki-Heung Park
- 优先权: KR10-2007-0086516 20070828
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/84
摘要:
Provided are a high-performance one-transistor floating-body DRAM cell device and a manufacturing method thereof. The one-transistor floating-body DRAM cell device includes: a semiconductor substrate; a gate stack which is formed on the semiconductor substrate; a control electrode which is formed on the semiconductor substrate and surrounded by the gate stack; a floating body which is formed on the control electrode that is surrounded by the gate stack; source/drain which are formed at left and right sides of the floating body; an insulating layer which insulates the source/drain from the semiconductor substrate and the control electrode; a gate insulating layer which is formed on the floating body and the source/drain; and a gate electrode which is formed on the gate insulating layer. In the cell device having a double-gate structure, charges can be stored in a non-volatile manner by the control electrodes, so that it is possible to improve a degree of integration of devices, a uniformity of characteristic, and a sensing margin.
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