发明申请
- 专利标题: LAMB WAVE TYPE ELASTIC WAVE DEVICE
- 专利标题(中): 拉姆波型弹性波形装置
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申请号: US12531385申请日: 2008-03-14
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公开(公告)号: US20100102668A1公开(公告)日: 2010-04-29
- 发明人: Yasuhiko Nakagawa
- 申请人: Yasuhiko Nakagawa
- 优先权: JP2007-065991 20070315
- 国际申请: PCT/JP2008/054717 WO 20080314
- 主分类号: H01L41/18
- IPC分类号: H01L41/18
摘要:
Provided is a device of a high-frequency resonator using Lamb wave type elastic wave having excellent frequency temperature characteristics, the device having a significantly small frequency change.The Lamb wave type elastic wave device has an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate. The cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfy any one of following expressions (Expressions 1 to 3). λ=90°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 1) λ=210°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 2) λ=330°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 3)
公开/授权文献
- US08008838B2 Lamb wave type elastic wave device 公开/授权日:2011-08-30
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