发明申请
- 专利标题: MEMS-scanning mirror device and method for manufacturing the same
- 专利标题(中): MEMS扫描镜装置及其制造方法
-
申请号: US12588804申请日: 2009-10-28
-
公开(公告)号: US20100103492A1公开(公告)日: 2010-04-29
- 发明人: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 申请人: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 专利权人: Kabushiki Kaisha Topcon
- 当前专利权人: Kabushiki Kaisha Topcon
- 优先权: JP2008-277897 20081029
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; B44C1/22
摘要:
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.