发明申请
- 专利标题: THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 薄膜晶体管阵列及其制造方法
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申请号: US12472979申请日: 2009-05-27
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公开(公告)号: US20100109007A1公开(公告)日: 2010-05-06
- 发明人: Yun-Seok LEE , Young-Je Cho , Sung-Hoon Kim
- 申请人: Yun-Seok LEE , Young-Je Cho , Sung-Hoon Kim
- 优先权: KR10-2008-0109512 20081105
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/336
摘要:
The present disclosure relates to a thin film transistor array panel and a manufacturing method thereof. The method comprises: forming a thin film transistor on a substrate; forming a color filter adjacent to the thin film transistor and over the same substrate; depositing a first passivation layer on the color filter; coating a photosensitive film on the first passivation layer and exposing the photosensitive film to light using a first photomask to form a first photosensitive film pattern that comprises a first portion and a second portion that is thicker than the first portion, the first photosensitive film pattern exposing the first passivation layer around a circumference of the second portion; removing the exposed first passivation layer using the first photosensitive film pattern as an etch mask; blanket etching a whole surface of the first photosensitive film pattern until the first portion is removed to form a second photosensitive film pattern; depositing a conductive layer on the second photosensitive film pattern; and removing the second photosensitive film pattern to thereby selectively lift off portions of the conductive layer where a left behind portion forms a pixel electrode.
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