发明申请
- 专利标题： MAGNETIC STACK DESIGN WITH DECREASED SUBSTRATE STRESS
- 专利标题（中）： 磁性堆叠设计具有减少的基板应力
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申请号： US12389422申请日： 2009-02-20
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公开(公告)号： US20100109107A1公开(公告)日： 2010-05-06
- 发明人: Yongchul Ahn , Shuiyuan Huang , Antoine Khoueir , Paul Anderson , Lili Jia , Christina Laura Hutchinson , Ivan Ivanov , Dimitar Dimitrov
- 申请人： Yongchul Ahn , Shuiyuan Huang , Antoine Khoueir , Paul Anderson , Lili Jia , Christina Laura Hutchinson , Ivan Ivanov , Dimitar Dimitrov
- 申请人地址： US CA Scotts Valley
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Scotts Valley
- 主分类号： H01L29/82
- IPC分类号： H01L29/82 ; H01L21/00
摘要：
A magnetic element and a method for making a magnetic element. The method includes patterning a first electrode material to form a first electrode on a substrate and depositing filler material on the substrate around the first electrode. The method further includes polishing to form a planar surface of filler and the first electrode. A magnetic cell is formed on the planar surface and a second electrode is formed on the magnetic cell. In some embodiments, the first electrode has an area that is at least 2:1 to the area of the magnetic cell.
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