Invention Application
- Patent Title: SEMICONDUCTOR INTEGRATED CIRCUITS INCLUDING GRATING COUPLER FOR OPTICAL COMMUNICATION AND METHODS OF FORMING THE SAME
- Patent Title (中): 半导体集成电路,包括用于光通信的光栅耦合器及其形成方法
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Application No.: US12684677Application Date: 2010-01-08
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Publication No.: US20100111469A1Publication Date: 2010-05-06
- Inventor: Junghyung PYO , O-Kyun Kwon , Gyungock Kim
- Applicant: Junghyung PYO , O-Kyun Kwon , Gyungock Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2007-0132341 20071217
- Main IPC: G02B6/122
- IPC: G02B6/122

Abstract:
Provided are semiconductor integrated circuits including a grating coupler for optical communication and methods of forming the same. The semiconductor integrated circuit includes: a cladding layer disposed on a semiconductor substrate; a grating coupler including an optical waveguide on the cladding layer and a grating on the optical waveguide; and at least one reflector formed in the cladding layer below the grating.
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