发明申请
- 专利标题： AUTOMATIC SUBSTRATE LOADING STATION
- 专利标题（中）： 自动基座装载站
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申请号： US12565485申请日： 2009-09-23
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公开(公告)号： US20100111650A1公开(公告)日： 2010-05-06
- 发明人: DAVID H. QUACH , Tetsuya Ishikawa
- 申请人： DAVID H. QUACH , Tetsuya Ishikawa
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
Embodiments of the present invention provide method and apparatus for automatically loading substrates to a substrate carrier tray. On embodiment of the present invention provides an automatic substrate loader comprises a cassette handling mechanism, a substrate aligner configured to align a substrate, and a carrier tray aligner. The automatic substrate loader further comprises a first robot configured to transfer substrates between the substrate aligner and the substrate storage cassettes, and a second robot configured to transfer substrates between the substrate aligner and the carrier tray disposed on the carrier tray aligner.
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