发明申请
US20100112482A1 FLUORINATED MONOMER OF CYCLIC ACETAL STRUCTURE, POLYMER, RESIST PROTECTIVE COATING COMPOSITION, RESIST COMPOSITION, AND PATTERNING PROCESS
有权
环状结构的聚合单体，聚合物，耐腐蚀保护涂料组合物，耐腐蚀组合物和图案处理
- 专利标题： FLUORINATED MONOMER OF CYCLIC ACETAL STRUCTURE, POLYMER, RESIST PROTECTIVE COATING COMPOSITION, RESIST COMPOSITION, AND PATTERNING PROCESS
- 专利标题（中）： 环状结构的聚合单体，聚合物，耐腐蚀保护涂料组合物，耐腐蚀组合物和图案处理
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申请号： US12608556申请日： 2009-10-29
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公开(公告)号： US20100112482A1公开(公告)日： 2010-05-06
- 发明人: Takeru WATANABE , Satoshi SHINACHI , Takeshi KINSHO , Koji HASEGAWA , Yuji HARADA , Jun HATAKEYAMA , Kazunori MAEDA , Tomohiro KOBAYASHI
- 申请人： Takeru WATANABE , Satoshi SHINACHI , Takeshi KINSHO , Koji HASEGAWA , Yuji HARADA , Jun HATAKEYAMA , Kazunori MAEDA , Tomohiro KOBAYASHI
- 优先权： JP2008-279212 20081030; JP2008-279224 20081030; JP2008-279231 20081030
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C07D307/04 ; C07D319/06 ; C07D315/00 ; C07D307/77 ; C08F114/18 ; C08F214/18 ; C08L27/12 ; C08K5/06 ; G03F7/20
摘要：
A fluorinated monomer of cyclic acetal structure has formula (1) wherein R is a C1-C20 alkyl group which may be substituted with halogen or separated by oxygen or carbonyl, and Z is a divalent organic group which forms a ring with alkylenoxy and contains a polymerizable unsaturated group. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water sliding property, lipophilicity, acid lability and hydrolyzability and is useful in formulating a protective coating composition and a resist composition.
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