发明申请
US20100119980A1 Antireflective Coating Composition Comprising Fused Aromatic Rings
审中-公开
包含熔融芳环的防反射涂料组合物
- 专利标题: Antireflective Coating Composition Comprising Fused Aromatic Rings
- 专利标题(中): 包含熔融芳环的防反射涂料组合物
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申请号: US12270256申请日: 2008-11-13
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公开(公告)号: US20100119980A1公开(公告)日: 2010-05-13
- 发明人: M. Dalil Rahman , Douglas McKenzie , Clement Anyadeigwu
- 申请人: M. Dalil Rahman , Douglas McKenzie , Clement Anyadeigwu
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; C08G61/00 ; C08G65/00 ; C08G63/02 ; C08G16/00 ; C08G16/02 ; C08L65/00
摘要:
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer where the polymer comprises (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1), (ii) at least one unit with of structure (2), and, (iii) at least one unit with a cyclic aliphatic moiety in the backbone of the polymer of structure (3). where, Fr1 is a substituted or unsubstituted fused aromatic ring moiety with 3 or more aromatic rings, R′ and R″ are independently selected from hydrogen, C1-C4 alkyl, Z, C1-C4alkyleneZ and where Z is substituted or unsubstituted aromatic moiety, R1 is selected from hydrogen or aromatic moiety, and B is a substituted or unsubstituted cycloaliphatic moiety. The invention further relates to a process for imaging the present composition.
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