发明申请
US20100120229A1 METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP, ADHESIVE FILM FOR SEMICONDUCTOR, AND COMPOSITE SHEET USING THE FILM
失效
制造半导体芯片的方法,用于半导体的粘合膜和使用电影的复合薄片
- 专利标题: METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP, ADHESIVE FILM FOR SEMICONDUCTOR, AND COMPOSITE SHEET USING THE FILM
- 专利标题(中): 制造半导体芯片的方法,用于半导体的粘合膜和使用电影的复合薄片
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申请号: US12594634申请日: 2008-03-31
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公开(公告)号: US20100120229A1公开(公告)日: 2010-05-13
- 发明人: Yuuki Nakamura , Tsutomu Kitakatsu , Youji Katayama , Keiichi Hatakeyama
- 申请人: Yuuki Nakamura , Tsutomu Kitakatsu , Youji Katayama , Keiichi Hatakeyama
- 优先权: JP2007-099344 20070405; JP2007-204338 20070806
- 国际申请: PCT/JP2008/056361 WO 20080331
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; B32B7/10
摘要:
There is provided a method that allows semiconductor chips to be obtained from a semiconductor wafer at high yield, while sufficiently inhibiting generation of chip cracks and burrs. The method for manufacturing a semiconductor chip comprises a step of preparing a laminated body having a semiconductor wafer, an adhesive film for a semiconductor and dicing tape laminated in that order, the semiconductor wafer being partitioned into multiple semiconductor chips and notches being formed from the semiconductor wafer side so that at least a portion of the adhesive film for a semiconductor remains uncut in its thickness direction, and a step of stretching out the dicing tape in a direction so that the multiple semiconductor chips are separated apart, to separate the adhesive film for a semiconductor along the notches. The adhesive film for a semiconductor has a tensile breaking elongation of less than 5% and the tensile breaking elongation of less than 110% of the elongation at maximum load.
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