Invention Application
- Patent Title: PROBE WITH BIDIRECTIONAL ELECTROSTATIC ACTUATION
- Patent Title (中): 具有双向静电激励的探头
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Application No.: US12272128Application Date: 2008-11-17
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Publication No.: US20100123470A1Publication Date: 2010-05-20
- Inventor: Dadi Setiadi , Wayne Bonin
- Applicant: Dadi Setiadi , Wayne Bonin
- Applicant Address: US CA Scotts Valley
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Scotts Valley
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
Public/Granted literature
- US08026732B2 Probe with bi-directional electrostatic actuation Public/Granted day:2011-09-27
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