Invention Application
US20100123470A1 PROBE WITH BIDIRECTIONAL ELECTROSTATIC ACTUATION 失效
具有双向静电激励的探头

PROBE WITH BIDIRECTIONAL ELECTROSTATIC ACTUATION
Abstract:
A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
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